Precision Machining Parts
Precision Machining Parts
With years of experience in precision machining, combined with the proficiency in metallurgy, modularization and assembly, engineering application and semiconductor-grade inspection, XALLOY is able to manufacture spare parts for semiconductor equipment.
- In the semiconductor field, we provide equipment consumables specifically for four major processes – Electrochemical Deposition (ECD), Dry Etching, Ion Implanting and Physical Vapor Deposition (PVD).
- The range of materials offered includes silicon, quartz, ceramics, and various metals (including Pt, Au, Ag, Pd, Ta, Ti, Al, Cu, Ni, SUS) as well as PEEK.
- Spare parts can be customized according to client requirements.
| Equipment | List of Parts |
|---|---|
| ECD | 1. Probe POT Potentiostatic Copper (Cu) 2. POT Cable Kit (Cu) 2. Titanium Fastener 3. Wafer Contact Ring |
| Etching | 1. Insert Ring, Si Ring 2. RF Gasket |
| Ion Implanter | 1. Ta Parts 2. Ag Parts 3. NiFe Parts 4. PEEK Insert Ring 5. Graphite Parts |
| PVD | 1. Ta Coil 2. SUS Clamp |
